Plants with dia. 1500 mm x Lg. 2000 mm
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Shroud internal dimension (Diameter x Depth): 1500xL2000 mm
Thermal bottom plate dimension (Width x Depth): 1100x2000 mm
Shroud Temperature Range: -70 to +120 ° C
Temperature Range with heaters: -70 to +150 ° C
Cooling Type: Mechanical
Vacuum limit room temperature (with turbopump): 5x10-7 mbar
Vacuum limit room temperature (with cryopump): 1x10-8 mbar


  • Cryogenic pump
  • Policold
  • Internal Heaters (lamps or tubolar heaters)

Other Available Sizes: